ENTEGRIS INC

Plastics Products, NEC·BILLERICA, MA·FY end 12/31·CIK 1101302

Named Executive Officers

FY 2025

Executive	Salary	Stock	Options	Bonus / Inc.	Other	Total
Bertrand LoyExecutive Chair and Former President and Chief Executive Officer	$950.3K	$8.9M	$3.5M	$840.2K	$137.8K	$14.3M
Susan RiceSenior Vice President, Global Human Resources and Corporate Communications	$511.0K	$1.3M	$494.9K	$248.7K	$51.6K	$2.6M
Joseph ColellaSenior Vice President, General Counsel, Chief Compliance Officer and Secretary	$521.0K	$1.2M	$480.0K	$253.6K	$51.1K	$2.5M
Daniel WoodlandSenior Vice President and President, Materials Solutions	$561.0K	$1.1M	$434.9K	$272.9K	$59.6K	$2.4M

Bertrand Loy · FY 2025

Stock awards$8.9M62%

Performance bonus$840.2K6%

Salary$950.3K7%

Other$3.6M25%

TSR % vs. CEO comp actually paid · 6 fiscal years · Item 402(v) disclosure

TSR

CEO comp

FY20

+93%

$31M

FY21

+179%

$29M

FY22

+32%

$-15M

FY23

+143%

$33M

FY24

+102%

$6M

FY25

-11%

$11M

CEO total compMedian employeePay ratio (right axis)